Silicon carbide device with trench gate

ABSTRACT

A silicon carbide device includes a stripe-shaped trench gate structure extending from a first surface into a silicon carbide body. The gate structure has a gate length along a lateral first direction. A bottom surface and an active first gate sidewall of the gate structure are connected via a first bottom edge of the gate structure. The silicon carbide device further includes at least one source region of a first conductivity type. A shielding region of a second conductivity type is in contact with the first bottom edge of the gate structure across at least 20% of the gate length.

TECHNICAL FIELD

The present disclosure is related to a silicon carbide device, inparticular, to a silicon carbide switch with transistor cells.

BACKGROUND

Electric circuits for transforming electrical energy, for example inDC/AC converters, AC/AC converters or AC/DC converters and in electriccircuits that drive inductive loads, e.g. in motor driver circuits, mayinclude power semiconductor devices as switches. Switching heavyinductive loads may trigger LC oscillations. On the other hand, thedielectric breakdown field strength of silicon carbide (SiC) is highcompared to silicon. SiC devices may be significantly thinner thanequivalent silicon devices for the same nominal blocking voltagecapability and, as a consequence, the on-state resistance of SiC devicesmay be significantly lower.

There is a need to increase the range of possible applications forsilicon carbide devices.

SUMMARY

An embodiment of the present disclosure relates to a silicon carbidedevice. The silicon carbide device includes a stripe-shaped trench gatestructure extending from a first surface into a silicon carbide body.The gate structure has a gate length along a lateral first direction. Abottom surface and a first gate sidewall of the gate structure isconnected via a first bottom edge of the gate structure. The siliconcarbide device further includes at least one source region of a firstconductivity type. A shielding region of a second conductivity type isin contact with the first bottom edge of the gate structure across atleast 20% of the gate length.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a furtherunderstanding of the embodiments and are incorporated in and constitutea part of this specification. The drawings illustrate embodiments of asilicon carbide device and together with the description serve toexplain principles of the embodiments. Further embodiments are describedin the following detailed description and the claims.

FIGS. 1A-1D illustrate schematic plan and vertical cross-sectional viewsof a portion of a silicon carbide device with source regions andshielding regions according to embodiments.

FIGS. 2A-2D illustrate schematic plan and vertical cross-sectional viewsof a portion of a silicon carbide device according to an embodiment witha shielding region including deep sub-sections arranged in a matrix.

FIGS. 3A-3D illustrate schematic plan and vertical cross-sectional viewsof a portion of a silicon carbide device according to an embodiment witha shielding region including stripe-shaped deep sections.

FIGS. 4A-4D illustrate schematic plan and vertical cross-sectional viewsof a portion of a silicon carbide device according to an embodiment witha shielding region including a grid-shaped deep section.

FIGS. 5A-5B illustrate schematic perspective views of a portion of asilicon carbide device according to another embodiment with a shieldingregion including laterally separated deep sub-sections.

FIGS. 6A-6C illustrate schematic horizontal cross-sectional views ofportions of silicon carbide devices according to further embodiments.

DETAILED DESCRIPTION

In the following detailed description, reference is made to theaccompanying drawings, which form a part hereof and in which are shownby way of illustrations specific embodiments in which a silicon carbidedevice may be practiced. It is to be understood that other embodimentsmay be utilized and structural or logical changes may be made withoutdeparting from the scope of the present disclosure. For example,features illustrated or described for one embodiment can be used on orin conjunction with other embodiments to yield yet a further embodiment.It is intended that the present disclosure includes such modificationsand variations. The examples are described using specific language,which should not be construed as limiting the scope of the appendingclaims. The drawings are not scaled and are for illustrative purposesonly. Corresponding elements are designated by the same reference signsin the different drawings if not stated otherwise.

The terms “having”, “containing”, “including”, “comprising” and the likeare open, and the terms indicate the presence of stated structures,elements or features but do not preclude the presence of additionalelements or features. The articles “a”, “an” and “the” are intended toinclude the plural as well as the singular, unless the context clearlyindicates otherwise.

The term “electrically connected” describes a permanent low-resistiveconnection between electrically connected elements, for example a directcontact between the concerned elements or a low-resistive connection viaa metal and/or heavily doped semiconductor material. The term“electrically coupled” includes that one or more intervening element(s)adapted for signal and/or power transmission may be connected betweenthe electrically coupled elements, for example, elements that arecontrollable to temporarily provide a low-resistive connection in afirst state and a high-resistive electric decoupling in a second state.An ohmic contact is a non-rectifying electrical junction with a linearor almost linear current-voltage characteristic.

The Figures illustrate relative doping concentrations by indicating “−”or “+” next to the doping type “n” or “p”. For example, “n−” means adoping concentration which is lower than the doping concentration of an“n”-doping region while an “n+”-doping region has a higher dopingconcentration than an “n”-doping region. Doping regions of the samerelative doping concentration do not necessarily have the same absolutedoping concentration. For example, two different “n”-doping regions mayhave the same or different absolute doping concentrations.

Two adjoining doping regions of the same conductivity type and withdifferent dopant concentrations form a unipolar junction, e.g., an n/n+or p/p+ junction along a boundary surface between the two dopingregions. At the unipolar junction a dopant concentration profileorthogonal to the unipolar junction may show a step or a turning point,at which the dopant concentration profile changes from being concave toconvex, or vice versa.

Ranges given for physical dimensions include the boundary values. Forexample, a range for a parameter y from a to b reads as a≤y≤b. The sameholds for ranges with one boundary value like “at most” and “at least”.

Main constituents of a layer or a structure from a chemical compound oralloy are such elements which atoms form the chemical compound or alloy.For example, nickel and silicon are the main constituents of a nickelsilicide layer and copper and aluminum are the main constituents of acopper aluminum alloy.

The term “above” is not to be construed as meaning “directly on”.Rather, if one element is positioned “above” another element (e.g., alayer is “above” another layer or “above” a substrate), a furthercomponent (e.g., a further layer) may be positioned between the twoelements (e.g., a further layer may be positioned between a layer and asubstrate if the layer is “above” said substrate).

As regards structures and doped regions formed in a silicon carbidebody, a second region is “below” a first region if a minimum distancebetween the second region and a first surface at the front side of thesilicon carbide body is greater than a maximum distance between thefirst region and the first surface. The second region is “directlybelow” the first region, where the vertical projections of the first andsecond regions into the first surface overlap. The vertical projectionis a projection orthogonal to the first surface.

Regions and/or structures may be laterally separated from each other inthe same horizontal layer. Laterally separated regions and/or structuresmay also be vertically separated (i.e., be positioned in differenthorizontal layers). In the latter case, orthogonal projections of theseparated regions and/or structures into a horizontal projection planeare laterally separated. Regions and/or structures laterally overlap, iforthogonal projections of the concerned regions and/or structures into ahorizontal projection plane laterally overlap.

The term “power semiconductor device” refers to semiconductor deviceswith high voltage blocking capability of at least 30 V, for example 100V, 600 V, 3.3 kV or more and with a nominal on-state current or forwardcurrent of at least 1 A, for example 10 A or more.

According to an embodiment, a silicon carbide device may include astripe-shaped trench gate structure extending from a first surface intoa silicon carbide body.

The silicon carbide body may have two essentially parallel main surfacesof the same shape and size and a lateral surface area connecting theedges of the two main surfaces. For example, the silicon carbide bodymay be a polygonal (e.g., rectangular or hexagonal) prism with orwithout rounded edges, or a cylinder. The silicon carbide body may havea surface extension along two horizontal directions and may have athickness along a vertical direction perpendicular to the horizontaldirections. The horizontal directions are also referred to as lateraldirections in the following.

The material of the silicon carbide body may be 15R—SiC (silicon carbideof 15R-polytype), or a silicon carbide with hexagonal polytype like2H—SiC, 4H—SiC or 6H—SiC, by way of example. In addition to the mainconstituents silicon and carbon, the silicon carbide body may includedopants atoms, for example nitrogen (N), phosphorus (P), beryllium (Be),boron (B), aluminum (Al) and/or gallium (Ga). Further, the siliconcarbide body may include unwanted impurities, for example hydrogen,fluorine and/or oxygen.

The stripe-shaped trench gate structure may extend from a first surfaceat a front side of the silicon carbide body into the silicon carbidebody. The gate structure has a gate length along a lateral firstdirection and a gate width along a lateral second direction, which isorthogonal to the first direction. The gate structure may include aconductive gate electrode. The gate structure may further include a gatedielectric formed between the gate electrode and the silicon carbidebody. Two opposite first and second gate sidewalls may be vertical ormay be slightly tilted to the vertical direction. The first and secondgate sidewalls may taper or may be parallel.

In general, at least the first gate sidewall may run essentially along acrystal plane of the silicon carbide body in which charge carriermobility is high (e.g., one of the {11-20} or the {1-100} crystalplanes). The first gate sidewall may be an active sidewall, that is tosay, a transistor channel may run along the first gate sidewall. In someembodiments, the second gate sidewall may also be an active sidewall(e.g., in the case of parallel first and second gate sidewalls likevertical trench gate structure). In other embodiments, (e.g. in case ofa tapering trench gate structure) the second gate sidewall may be aninactive sidewall. Seen from the front side of the silicon carbide body,the first gate sidewall is at a first side of the gate structure and thesecond gate sidewall is at an opposite second side of the gatestructure.

A bottom surface at the bottom of the gate structure connects the firstand second gate sidewalls via a first and a second bottom edge. Thebottom surface may include a horizontal portion. The first gate sidewallmay include a straight section. The first bottom edge may connect ahorizontal portion of the bottom surface and a straight section of thefirst gate sidewall. Accordingly, the second bottom edge may connect ahorizontal portion of the bottom surface and a straight section of thesecond gate sidewall. The first bottom edge between the bottom surfaceand the first gate sidewall may be sharp-angled or may be rounded and/orbeveled (e.g., with a blunt angle). The second bottom edge between thebottom surface and the second gate sidewall may be sharp-angled or maybe rounded and/or beveled (e.g., with a blunt angle).

The silicon carbide device may further include at least one sourceregion. The at least one source region may be a doped region of a firstconductivity type. The source region may be in contact with the firstgate sidewall of the gate structure or may be in contact with a firstgate sidewall of a further gate structure. In other words: No sourceregion, one single source region or a plurality of source regions may beformed along the first gate sidewall of the gate structure. In case nosource region is formed along the first gate sidewall of the gatestructure, at least one source region may be formed along a further gatestructure. Source regions formed along the same gate structure may beseparated from each other along the first direction. A length of eachsource region along the first direction may be at least 500 nm, e.g., atleast 1 μm.

The silicon carbide device may further include a shielding region. Theshielding region may be a doped region of a second conductivity type.The first conductivity type and the second conductivity type arecomplementary conductivity types. The first conductivity type may ben-type and the second conductivity type may be p-type. Alternatively,the first conductivity type may be p-type and the second conductivitytype may be n-type.

The shielding region is in contact with the first bottom edge across atleast 20% of the gate length of the gate structure. For example, theshielding region may extend along the complete length of the gatestructure. The shielding region may at least partially extend along thefirst gate sidewall. According to other examples, the shielding regionextends across at least 20% of the first gate sidewall. Along the firstbottom edge, the shielding region may be absent at least in sectionsvertically below the source regions. Where the shielding region is incontact with the first bottom edge, the shielding region may verticallyextend along the first gate sidewall from the first surface to the firstbottom edge.

According to another example, the shielding region may extend across atleast 30% of the distance between neighboring source regions.

The shielding region may further be in contact with the second gatesidewall, with the second bottom edge and/or the bottom surface of thegate structure. The shielding region may be in contact with the secondgate sidewall and the second bottom edge across the complete gate lengthof the gate structure. The shielding region may be in contact with afully-shielded section of the bottom surface along the second bottomedge across the complete gate length of the gate structure. Theshielding region may be in contact with a partly-shielded section of thebottom surface along the first bottom edge in sections betweenneighboring source regions.

With the shielding region in contact with a significant section of thefirst bottom edge, a significant portion of the gate structure may beembedded completely in the shielding region. Since the shielding regionmay shield the gate structure against a potential applied to a rear sidepotential, e.g., the drain potential, an increased portion of theshielding region along the first gate sidewall may reduce agate-to-drain capacitance C_(GD). The shielding region may beelectrically connected to a front side potential, e.g., the sourcepotential. In this case, an increased portion of the shielding portionin relation to the source regions may increase a gate-to-sourcecapacitance C_(GS). Increased C_(GS) and reduced C_(GD) significantlyreduce turn-off oscillation tendency.

The greater portion of the shielding region along the first surface mayprovide a larger contact area between the shielding region and a frontside electrode formed on the first surface. The larger contact area mayreduce on ohmic contact resistance between the front side electrode andthe shielding region. In addition, the larger area portion of theshielding region along the first surface may further simplify theformation of reliable, low-resistance ohmic contacts between theshielding region and the front side electrode. As a result, thesurge-current ruggedness of a body diode, which the shielding regionforms with a drift structure, may be significantly improved. The largercontact area and the reduced ohmic resistance of the contact between thefront side electrode and the shielding portion may also contribute toreducing current overshoot during turn-on, reducing body diode lossesand/or in reducing the turn-off oscillation tendency.

Formation of the shielding region along the first gate sidewall mayreduce the area portion of the source regions and, as a consequence, atotal transistor channel width. The reduced transistor channel width incombination with the improved shielding of the transistor channel fromsuch portions of the shielding region, which are formed between thesource regions along the first direction, may contribute to decreasingthe transistor saturation current and thus may improve short-circuitrobustness. In addition, the completely shielded portion of the bottomsurface is increased and the not-completely shielded portion of thebottom surface can be shielded effectively from all four lateral sides.Both effects may further contribute to increasing gate dielectricreliability.

Since in high voltage devices, for example in devices with a voltageblocking capability of at least 600 V, for example at least 3 kV, theresistance of a voltage sustaining layer dominates the on-state losses,it is possible that a possibly slightly increased on-state resistance ofthe transistor channel may be negligible. On the other hand, theformation of the shielding region along a significant portion of thefirst gate sidewall may significantly soften switching behavior, mayimprove body diode characteristics and/or may increase short-circuitruggedness. In particular, high voltage devices with a voltage blockingcapability of at least 600 V, for example at least 3 kV, may benefitfrom a shielding region extending across a significant portion of thefirst gate sidewall.

According to an embodiment, the shielding region may be in contact withthe first bottom edge across at least 30%, for example at least 50%, ofthe gate length. The greater portion of the shielding region may furtherreduce C_(GD), may further increase C_(GS) and/or may further improvedevice reliability.

According to an embodiment, the shielding region may include a topshielding portion and a deep shielding portion. The top shieldingportion is located between the first surface and the deep shieldingportion. The top shielding portion may adjoin (e.g., directly adjoin)the first surface. A vertical extension of the top shielding portion maybe greater than a vertical extension of the gate structure. The topshielding portion may be in contact with the first bottom edge, e.g. atleast in places.

The top shielding portion may be in contact with the second bottom edgeof the gate structure along the complete length of the gate structure.The deep shielding portion may be formed in a layer of the siliconcarbide body between the bottom surface of the gate structure and asecond surface at the rear side of the silicon carbide body.

A horizontal cross-sectional area of the deep shielding portion may bethe same or essentially the same as the horizontal cross-section of thetop shielding portion, wherein the same implant mask may be used forforming the deep shielding portion and the top shielding portion.Alternatively, the horizontal cross-sectional areas or the top shieldingportion and the deep shielding portion may be considerably different. Inthe latter case, different implant masks may define the deep shieldingportion and the top shielding portion.

The top shielding portion and the deep shielding portion may be directlyconnected to each other along the vertical direction. The top shieldingportion and the deep shielding portion may overlap with each other inthe sense that one or more end-of-range peaks of implants defining thedeep shielding portion may be located within the top shielding portion.The deep shielding portion may be continuous along the verticaldirection.

The deep shielding portion may improve the shielding effect on thetransistor channel and on such portions of the gate dielectric that arenot directly embedded in the shielding region. The improved shielding ofthe transistor channel may reduce DIBL (drain induced barrier lowering).

The improved lateral shielding effect may facilitate sufficientshielding even at comparatively low vertical extension of the shieldingregion, e.g. the deep shielding portion. For example, the improvedlateral shielding may compensate at least partly a reduction of thevertical extension of the deep shielding portion by omitting implant(s)with implant energy greater than 1.3 MeV. For example, a verticaldistance between the gate bottom surface and a lower edge of the deepshielding portion may be reduced to at least 50 nm, e.g. at least 300nm.

According to an embodiment, a first distance between the top shieldingportions and the first gate sidewall may be smaller than a seconddistance between the deep shielding portions and the first gatesidewall. For example, a surface section of the top shielding portionmay directly adjoin the source region. The deep shielding portion mayhave a lateral distance to the source regions along at least one lateraldirection and/or may laterally overlap with the source region along atleast one lateral direction.

According to an embodiment, the top shielding portion may includeseparation sections. The separation sections may be in contact with thefirst gate sidewall. The separation sections may extend from the firstsurface down to the first bottom edge. The separation sections maylaterally separate source regions that are formed along the firstdirection along the gate structure. In this case, the top shieldingportion may shield each transistor channel from all four lateral sides.

According to an embodiment, the top shielding portion may includeseparation sections. The separation sections may be located between thesource regions. For example, the separation sections may be in contactwith the first gate sidewall. Along the first surface, the separationsections and the source regions may cover a continuous part of the firstgate sidewall of the gate structure along the first direction. Theseparation sections and the source regions may entirely cover the firstgate sidewall along the first surface.

The separation sections and the source regions may have the same widthalong the second direction. Along the first surface, the separationsections of the top shielding portion and the source regions maycomplement each other to a first contiguous area without gaps. Theabsence of further doped regions along the first gate sidewall or in thevicinity of the first gate sidewall may facilitate forming the topshielding portion and the source regions by using comparatively simplephotomasks.

According to an embodiment, the silicon carbide device may include afirst gate structure and a neighboring second gate structure. Each ofthe first gate structure and the second gate structure may be embodiedas the afore-mentioned gate structure. The first gate structure or thesecond gate structure may even correspond to the afore-mentioned gatestructure.

The top shielding portion and the source regions assigned to the firstgate structure may be arranged between the first gate sidewall of thefirst gate structure and the second gate sidewall of the second gatestructure.

In particular, it is possible that no further doped region, which hasthe conductivity type of the source region and which is electricallyconnected through an ohmic path with the voltage sustaining layer,adjoins the first surface in the area between the first gate structureand the second gate structure.

At the first surface, an area between the first gate sidewall and thesecond gate sidewall may be filled with the top shielding portion andthe source regions. In particular, the area between the first gatestructure and the second gate structure may be entirely filled with theexposed surfaces of the shielding portion and the source region.

In other words, between the first gate sidewall of the first gatestructure and the second gate sidewall of the second gate structure, thetop shielding portion and the source regions may complement each otheralong the first surface to a second contiguous area. The secondcontiguous area includes the first contiguous area and a furtherstripe-shaped portion of the top surface of the top shielding portion inthe first surface. The absence of further doped regions betweenneighboring gate structures may further simplify formation of the topshielding portion and the source regions.

According to an embodiment, along the first direction a lateral dopantprofile through a transition between one of the separation sections andone of the source regions may include a plateau section. The plateausection may reflect that along the first direction the openings in animplant mask for the source region implant can be narrower than thelength of the mask columns of an implant mask for the top shieldingportion implant. The length of the plateau sections corresponds to thedifference between the extension of the mask columns for the topshielding portion implant and the extension of the mask openings for thesource region implant along the first direction. The length of eachplateau section may be at least 50 nm, 200 nm or even 500 nm. Forexample, in the plateau section the dopant concentration may change bynot more than one order of magnitude across a distance of 50 nm or 200nm or even 500 nm. In the plateau section, the conductivity type may bethe conductivity type of the separation section or the conductivity typeof the source region, or intrinsic. The plateau section may simplify thealignment of implant masks for the formation of the source regionsand/or separation sections.

According to an embodiment, the silicon carbide device may include afirst gate structure and a neighboring second gate structure. The firstgate structure and the second gate structure may be embodied as theafore-mentioned gate structure. The first gate structure or the secondgate structure may even correspond to afore-mentioned gate structure.

The deep shielding portion may include a deep section. Along the seconddirection, the deep section may be laterally separated from the firstgate sidewall of the first gate structure. Further, each deep sectionmay laterally overlap with the second gate sidewall of the second gatestructure.

For example, the silicon carbide device may include a plurality of gatestructures. The deep shielding portion may include a plurality of deepsections separated from each other at least along the second direction.Along the second direction, each deep section may be laterally separatedfrom the first gate sidewall of a first one of two neighboring gatestructures and may laterally overlap the second gate sidewall of asecond one of the two neighboring gate structures.

According to an embodiment, the deep section may form a contiguousstripe with a longitudinal axis parallel to the first direction. Thedeep section may extend across at least 90% of the gate length or acrossthe complete gate length.

For example, the silicon carbide device may include a plurality of gatestructures and a plurality of deep sections. The deep sections may belaterally separated along the second direction. The deep sections mayform contiguous stripes with longitudinal axes parallel to the firstdirection. For example, each deep section may extend across at least 90%of the gate length or across the complete gate length. Withstripe-shaped deep sections, it may be possible that forming the deepsections gets along without fine adjustment of a photomask along thefirst direction. Each stripe-shaped deep section may contribute toshielding transistor channels formed on opposite longitudinal sides ofthe stripe-shaped deep sections.

According to another example, the deep section may include a pluralityof deep sub-sections. The deep sub-sections may be laterally separatedalong the first direction. The deep sub-sections may be arrangedmatrix-like in lines and rows, wherein the rows may run orthogonal tothe lines. Two of the deep sub-sections are formed on opposite sides ofeach source region along the second direction. In this way, eachtransistor channel may be shielded by at least two deep sub-sectionsformed on opposite lateral sides.

In case the source regions assigned to neighboring gate structures areshifted to each other, e.g. by half of the center-to-center distancebetween neighboring source regions, each transistor channel may beshielded by four deep sub-sections formed on four opposite lateralsides. The deep sub-sections may be absent in regions where a shieldingregion has only small or negligible shielding effect. With matrix-likearranged deep sections it may be possible to maintain a high lateralspreading of the on-state current. Matrix-like arranged deepsub-sections may keep small possible adverse effects of the deepsub-sections on other electric characteristics of the silicon carbidedevice, e.g. the on-state resistance.

According to another embodiment, a horizontal cross-section of the deepshielding portion may include a grid with grid openings. Each gridopening may laterally enclose at least a portion of one source region.For example, each grid opening may laterally enclose one complete sourceregion. According to another example, each grid opening may enclose achannel sidewall section. For example, a horizontal cross-section of thedeep shielding portion may be more or less identical with the horizontalcross-section of the top shielding portion below a plurality of gatetrenches and may be formed by using the same implantation mask. Thegrid-shaped deep shielding portion may facilitate a high shieldingeffect.

According to another embodiment, the silicon carbide device may includea first gate structure and a neighboring second gate structure. Thefirst gate structure and the second gate structure may be embodied asthe afore-mentioned gate structure. The first gate structure or thesecond gate structure may even correspond to afore-mentioned gatestructure.

The shielding region may be in contact with the first bottom edge acrossthe gate length of the first gate structure. It is possible that analignment of the shielding region along the first direction is notrequired. The manufacturing process may thus be highly effective.

According to an embodiment, the source region may extend along the gatelength of the second gate structure. It is possible that an alignment ofthe source region along the first direction is not required. Themanufacturing process may thus be highly effective.

According to another embodiment, the silicon carbide device may includea body region of the second conductivity type and a current spreadregion of the first conductivity type. The body region and the currentspread region may be formed in the silicon carbide body. The body regionmay separate the source region and the current spread region.

In the on-state of the silicon carbide device, a transistor channel maybe formed in the body region. The transistor channel may be an inversionlayer formed along the gate structure. The inversion layer facilitates aunipolar charge carrier flow between the source region and the currentspread region in the on-state.

According to another embodiment, the silicon carbide device may includea drift structure between the gate structures and the second surface ofthe silicon carbide body. The drift structure may include a voltagesustaining structure. The voltage sustaining structure may include alightly doped drift zone with a vertical extension of at least 4 μm, 12μm, 20 μm or even at least 100 μm. The minimum vertical extension maydepend on the desired blocking capability of the silicon carbide device.For example, for a desired blocking capability of 650V (or 1.2 k V or1.7 V or 3.3 kV or 6.5 kV) the vertical extension of the drift zone maybe at least 4 μm (or at least 8 μm or at least 12 μm or at least 20 μmor at least 40 μm, respectively). Alternatively or in addition, thevoltage sustaining structure may include a compensation structure, e.g.a superjunction structure.

The shielding region and the drift structure may form a pn junction. Thepn junction may be effective as body diode or as part of a body diode,which is in the forward conducting mode when the silicon carbide deviceis reverse-biased. The large contact area for the shielding region alongthe first surface may facilitate a low ohmic contact between theshielding region and a front side electrode and may improve the electriccharacteristics of the body diode.

FIGS. 1A-1D show a portion of a silicon carbide device 500 with asilicon carbide body 100. The silicon carbide device 500 may be or mayinclude an IGFET (insulated gate field effect transistor), for examplean MOSFET (metal oxide semiconductor FET), or an MCD (MOS controlleddiode) or an IGBT (insulated gate bipolar transistor), by way ofexample.

The silicon carbide body 100 may include or consist of singlecrystalline silicon carbide, e.g., a silicon carbide crystal includingthe main constituents silicon and carbon. The silicon carbide crystalmay include unwanted impurities like hydrogen, and/or oxygen and/orintended impurities, e.g., dopant atoms. The polytype of the siliconcarbide crystal may be 15R or may be hexagonal, e.g. 2H, 6H, or 4H. Thesilicon carbide body 100 may include or consist of a silicon carbidelayer grown by epitaxy.

A first surface 101 at a front side of the silicon carbide body 100 maybe planar or ribbed. A mean plane of the first surface 101 extends alonghorizontal directions. The mean plane of a planar first surface 101 isidentical with the planar first surface 101. In case of a non-planarfirst surface 101, for example in case of a ribbed first surface 101,the mean plane may be a planar least squares plane. Position andorientation of the planar least squares plane are defined such that thesum of the squares of the deviations of surface points of the ribbedfirst surface 101 from the planar least squares plane has a minimum. Avertical direction 104 is orthogonal to the horizontal directions, e.g.parallel to the surface normal onto the mean plane. The horizontaldirections are also referred to as lateral directions in the following.

The vertical direction 104 may coincide with a main lattice direction ormay be tilted to a main lattice direction by an off-axis angle, whereinthe off-axis angle may be in a range from 2° to 8°, in particular 4°. Atthe rear side of the silicon carbide body 100, a second surface mayextend parallel to a planar first surface 101 or parallel to the leastsquares plane of a ribbed first surface 101.

Transistor cells TC are formed at the front side of the silicon carbidebody 100. A drift structure 130 laterally extends through the siliconcarbide body 100 between the transistor cells TC and the second surface.The drift structure 130 may include a voltage sustaining structure,e.g., a lightly doped drift zone and/or a compensation structure, e.g. asuperjunction structure.

Each transistor cell TC includes a source region 110 of a firstconductivity type and a body region 120 of a second conductivity type.The body region 120 and the drift structure 130 form a first pn junctionpn1. The body region 120 and the source region 110 form a second pnjunction pn2. A vertical extension of the body region 120 corresponds toa channel length of the transistor cells TC and may be in a range from0.2 μm to 1.5 μm.

Stripe-shaped trench gate structures 150 extend along a lateral firstdirection 291. At least one gate structure 150 is in contact with thesource regions 110 and the body regions 120 of the transistor cells TC.The gate structures 150 include a conductive gate electrode 155 that mayinclude or consist of a heavily doped polycrystalline silicon layerand/or a metal-containing layer. A gate dielectric 159 separates thegate electrode 155 from the silicon carbide body 100 along at least oneside of the gate structure 150. The gate dielectric 159 may include orconsist of thermally grown or deposited silicon oxide, silicon nitride,silicon oxynitride, another deposited dielectric material or anycombination thereof. A thickness of the gate dielectric 159 may beselected to obtain transistor cells TC with a threshold voltage in arange from 1.0 V to 8 V. The gate structures 150 may exclusively includethe gate electrode 155 and the gate dielectric 159 or may includefurther conductive and/or dielectric structures in addition to the gateelectrode 155 and the gate dielectric 159.

The gate structures 150 may be equally spaced and/or may have a uniformgate width w0. A center-to-center distance between neighboring gatestructures 150 may be in a range from 0.5 μm to 10 μm, e.g., from 1 μmto 5 μm. A gate length L0 of the gate structures 150 may be up toseveral millimeters. A vertical gate extension v0 of the gate structures150 may be in a range from 0.3 μm to 5 μm, e.g., in a range from 0.5 μmto 2 μm.

Opposing first and second gate sidewalls 151, 152 of each of the gatestructures 150 may run essentially along the vertical direction 104 ormay be tilted with respect to the vertical direction 104 by a tiltangle. In the latter case, the gate structures 150 may have parallelfirst and second gate sidewalls 151, 152 or the gate structures 150 maytaper with increasing distance to the first surface 101. The tilt anglebetween the gate sidewalls 151, 152 and the vertical direction 104 maybe chosen according to the alignment of the crystal axes and/oraccording to the off-axis angle.

For example, the absolute value of the tilt angle between the first gatesidewall 151 and the vertical direction 104 may deviate from theabsolute value of the off-axis angle by not more than ±1° (e.g. in thecase of 4H—SiC, the tilt angle may range from at least 3° to at most5°). The tilt angle may, however, deviate from the off-axis angle inorientation. The tilt angle between the second gate sidewall 152, whichis opposite to the first gate sidewall 151, and the vertical direction104 may be oriented equal to or opposite to the tilt angle of the firstgate sidewall 151. The larger the tilt angle, the narrower a taperinggate structure 150 becomes starting from the first surface 101.

In general, at least the first gate sidewall 151 may run essentiallyalong a crystal plane of the silicon carbide body 100 in which chargecarrier mobility is high (e.g., one of the {11-20} or the {1-100}crystal planes). The first gate sidewall 151 may be an active sidewall,that is to say, the transistor channel may run along the first gatesidewall 151. In some embodiments, the second gate sidewall 152 may alsobe an active sidewall (e.g., in the case of a vertical trench gatestructure 150). In other embodiments, (e.g. in case of a tapering trenchgate structure 150) the second gate sidewall 152 may be an inactivesidewall.

A bottom surface 158 at the bottom of the gate structures 150 connectsthe first and second gate sidewalls 151, 152 or forms at least part of aconnection between the first gate sidewall 151 and the second gatesidewall 152. The bottom surface 158 may include a horizontal portion.The bottom surface 158 and the first gate sidewall 151 of each gatestructure 151 may be connected via a first bottom edge 156. The bottomsurface 158 and the second gate sidewall 152 of each gate structure 150may be connected via a second bottom edge 157. The first bottom edge 156may be sharp-angled or may be rounded and/or beveled. The second bottomedge 157 may be sharp-angled or may be rounded and/or beveled.

In FIG. 1A a plurality of isolated source regions 110 are formed in aportion of the silicon carbide body 100 between two neighboring gatestructures 150. A lateral length L1 of the source regions 110 along thefirst direction 291 may be at least 500 nm, e.g., at least 1 μm.

Separation sections 161 of the shielding regions 160 may laterallyseparate neighboring source regions 110 at the first surface 101 alongthe first direction 291. A lateral width w2 of the separation sections161 and a lateral width w1 of the source regions 110 may be equal. Theseparation sections 161 and the source regions 110 formed between thesame two gate structures 150 may complement each other to a firstcontiguous area 410 in the plane of the first surface 101. The firstcontiguous area 410 does not include a gap.

FIG. 1B shows one single source region 110 formed between twoneighboring gate structures 150. The source region 110 may extendwithout any interruption along the complete gate length L0. In otherwords, the source region 110 may extend from one longitudinal end of thegate structure 150 to the opposite longitudinal end. Along another gatestructure 150 without source region 110, the shielding region 160 mayextend without any interruption along the complete gate length L0.

The shielding region 160 may extend along one or more further gatestructures 150 from one longitudinal end of the concerned gate structure150 to the opposite longitudinal end.

Channel sidewall sections 153 of the first gate sidewalls 151 extendfrom the source regions 110 down to the first bottom edges 156.

The shielding region 160 extends from the first surface 101 into thesilicon carbide body 100 as illustrated in FIGS. 1C and 1D. Theshielding region 160 may be in direct contact with the inactive secondgate sidewalls 152 across the gate length L0 and across the verticalgate extension v0. Along the second gate sidewalls 152, the shieldingregion 160 extends from the first surface 101 down to below the gatestructure 150. A first vertical extension v1 of the shielding regions160 is greater than the vertical gate extension v0. For example, avertical distance v3 between the gate bottom surface 158 and a loweredge of the shielding region 160 may be at least 50 nm, e.g. at least300 nm.

The shielding region 160 includes sections between the body regions 120and the inactive second gate sidewalls 152. The body regions 120 and theshielding region 160 may form unipolar junctions. The shielding region160 may include the separation sections 161 separating neighboringsource regions 120 along the first direction 291. The separationsections 161 are in direct contact with the first gate sidewalls 151outside the channel sidewall sections 153.

A maximum dopant concentration in the shielding region 160 may be higherthan a maximum dopant concentration in the body region 120. A verticaldopant concentration profile in the shielding region 160 may have alocal maximum at a position below the gate structure 150. Along thesecond gate sidewall 152 a dopant concentration in the shielding region160 may be higher, i.e., at least ten times as high as a dopantconcentration in the body region 120 along the first gate sidewalls 151.

In FIGS. 2A-2D the shielding region 160 includes a top shielding portion168 and a deep shielding portion 169. The deep shielding portion 169 andthe top shielding portion 168 are connected with each other along thevertical direction 104.

A vertical extension v2 of the top shielding portion 168 is greater thanthe vertical gate extension v0. The deep shielding portion 169 includesa plurality of deep sub-sections 164 arranged along parallel lines andparallel rows, wherein the rows run orthogonal to the lines. Along thehorizontal second direction 292, each deep sub-section 164 is formedbetween two neighboring source regions 110. The deep sub-sections 164may be laterally separated from the source regions 110. Along thehorizontal first direction 291, neighboring deep sub-sections 164 of thesame row are laterally separated. A horizontal length of the deepsub-sections 164 along the first direction 291 may be equal to, smallerthan, or greater than a length of the source regions 110 along the firstdirection 291.

For example, the top shielding portion 168 may improve the lateralshielding of the gate dielectric and the transistor channel to a degreesuch that it is possible to symmetrically withdraw the deep sub-sections164 along the first direction 291 with reference to the edges of thesource regions 110 as illustrated. In this case, the horizontal lengthof the deep sub-sections 164 is smaller than the length of the sourceregions 110.

A first distance d1 between the top shielding portions and the firstgate sidewalls 151 may be smaller than a second distance d2 between thedeep shielding portions 168 and the first gate sidewalls 151.

The drift structure 130 may include a drift zone 131 of the firstconductivity type. The drift zone 131 forms a voltage sustainingstructure, wherein a vertical extension and a dopant concentration inthe drift zone 131 may be selected such that the silicon carbide device500 provides a nominal blocking voltage capability in an off state ofthe silicon carbide device 500. The drift zone 131 may be formed in alayer grown by epitaxy. A mean net dopant concentration in the driftzone 131 may be, for example, in a range from 1E15 cm⁻³ to 5E16 cm⁻³.According to another example, the drift structure 130 may include acompensation structure, e.g. a superjunction structure.

A heavily doped contact portion 139 may be formed between the driftstructure 130 and a rear side electrode that directly adjoins the secondsurface 102 of the silicon carbide body 100. The heavily doped contactportion 139 and the rear side electrode form a low-resistive ohmiccontact. The contact portion 139 may have the same conductivity type asthe drift zone 131, the opposite conductivity type, or may include zonesof both conductivity types.

The drift structure 130 may include current spread regions 137. Thecurrent spread regions 137 may be formed between the body regions 120and the voltage sustaining structure, e.g., the drift zone 131. Thecurrent spread regions 137 may be in contact with the body regions 120.The current spread regions 137 may laterally separate neighboring deepsub-sections 164. Portions of the current spread regions 137 may beformed directly below the deep shielding portions 169. The currentspread regions 137 have a higher mean dopant concentration than thedrift zone 131 and may facilitate a better lateral spreading of theon-state current.

Implant masks defining the deep sub-sections 164 and/or the sourceregions 110 may have rounded openings, e.g., oval or circular openings.Accordingly, the horizontal cross-sectional areas of the deepsub-sections 164 and/or the source regions 110 may include circularsegments, oval segments, circles and/or ovals. An implant mask definingthe top shielding portion 168 may include rounded columns, e.g., oval orcircular columns. Accordingly, the horizontal cross-sectional areas ofopenings in the top shielding portion 168 may be circular segments, ovalsegments, circles and/or ovals.

A first load electrode 310 at the front side of the silicon carbide body100 is electrically connected with the source regions 110, the bodyregions 120, and the shielding regions 160. The gate electrode 155 maybe electrically connected to a gate metallization at the front side ofthe silicon carbide body 100. The gate metallization forms or iselectrically connected or coupled to a gate terminal.

Portions of an interlayer dielectric 210 separate the first loadelectrode 310 and the gate electrode 155 in the gate structures 150. Thefirst load electrode 310 may form or may be electrically connected withor coupled to a first load terminal, which may be an anode terminal ofan MCD or a source terminal of an MOSFET.

A second load electrode 320 forms a low-resistive ohmic contact with thecontact portion 139. The second load electrode 320 may form or may beelectrically connected with or coupled to a second load terminal, whichmay be a cathode terminal of an MCD or a drain terminal of an MOSFET.

The illustrated silicon carbide device 500 is an n-channel SiC TMOSFET,wherein the first load electrode 310 forms or is electrically connectedor coupled to a source terminal S and wherein the second load electrode320 forms or is electrically connected or coupled to a drain terminal D.The silicon carbide device 500 includes a plurality of transistor cellsTC and a plurality of gate structures 150. The transistor cells TC maybe electrically connected in parallel.

In FIGS. 3A-3D deep sections 163 of the deep shielding portion 169 formcontiguous stripes with longitudinal axes parallel to the horizontalfirst direction 291.

In FIGS. 4A-4D a horizontal cross-sectional area of the deep shieldingportion 169 forms a grid with grid openings 167. Each grid opening 161is formed around a source region 110.

FIGS. 5A-5B show perspective views of a silicon carbide device 500 withsource regions 110 formed along channel sidewall sections 153 of thefirst gate sidewalls 151. The deep shielding portions 169 includedot-shaped deep sub-sections 164. The shielding regions 160 include aheavily doped contact section 162 formed along the first surface 101.

FIGS. 6A and 6B refer to silicon carbide devices 500 with a plurality ofgate structures 150. A plurality of source regions 110 is formed alongthe first gate sidewalls 151 of the gate structures 150. Along the firstsurface 101, top shielding portions 168 of shielding regions and thesource regions 110 complement each other to a second contiguous area 400between two neighboring gate structures 150.

In FIG. 6A the source regions 110 are arranged matrix-like in lines androws, wherein the rows run orthogonal to the lines. In other words, thesource regions 110 are formed in the black and in the white fields of acheckerboard.

In FIG. 6B the source regions 110 of neighboring gate structures 150 areshifted to each other by half the center-to-center distance betweenneighboring source regions 110 along the first direction 291. In otherwords, the source regions 110 may be formed only in the “white” fieldsof a checkerboard.

In FIG. 6C each source region 110 extends along the complete gate lengthof gate structures 150 of a first type and are completely absent alongthe first gate sidewalls 151 of gate structures 150 of a second type.Gate structures 150 of the first type and of the second type may form aregular pattern. For example, one, two, three or more gate structures150 of the first type (in contact with source regions 110) may be formedbetween each pair of gate structures 150 of the second type (withoutcontact to source regions 110).

For illustration, various scenarios have been described with respect toa silicon carbide device. Similar techniques may be implemented insemiconductor devices based on other kinds and types of compoundsemiconductors material for a semiconductor body, e.g., gallium nitride(GaN) or gallium arsenide (GaAs), etc.

For illustration, various scenarios have been described with respect toa silicon carbide device without integrated Schottky diode. Some of theembodiments may be combined with Schottky contacts between the frontside electrode and diode regions of the first conductivity type. Thediode regions may extend between neighboring gate structures from thefirst surface to the drift structure. Alternatively or in addition,separation sections may laterally separate Schottky contacts from sourceregions. For example, p doped separation sections may laterally separaten-doped diode regions from n doped source regions.

What is claimed is:
 1. A silicon carbide device, comprising: anasymmetric transistor cell that includes a stripe-shaped trench gatestructure extending from a first surface into a silicon carbide body,the gate structure having a gate length along a lateral first direction,a bottom surface and a first gate sidewall of the gate structure beingconnected via a first bottom edge of the gate structure; at least onesource region of a first conductivity type in contact with the firstgate sidewall; and a shielding region of a second conductivity type incontact with the first bottom edge of the gate structure across at least20% of the gate length, wherein no source regions of the firstconductivity type are in contact with a second gate sidewall of the gatestructure.
 2. The silicon carbide device of claim 1, wherein theshielding region is in contact with the first bottom edge across atleast 30% of the gate length.
 3. The silicon carbide device of claim 1,wherein the shielding region comprises a top shielding portion and adeep shielding portion, wherein the top shielding portion is between thefirst surface and the deep shielding portion, and wherein the topshielding portion is in contact with the first bottom edge.
 4. Thesilicon carbide device of claim 3, wherein a first distance between thetop shielding portion and the first gate sidewall is smaller than asecond distance between the deep shielding portion and the first gatesidewall.
 5. The silicon carbide device of claim 3, wherein the topshielding portion comprises separation sections, wherein the separationsections are in contact with the first gate sidewall, and wherein eachseparation section laterally separates source regions formed along thefirst direction.
 6. The silicon carbide device of claim 3, wherein thetop shielding portion comprises separation sections that are locatedbetween the source regions, and wherein along the first surface, theseparation sections and the source regions cover a continuous part ofthe first gate sidewall of the gate structure.
 7. The silicon carbidedevice of claim 3, wherein the silicon carbide device comprises a firstgate structure and a neighboring second gate structure, wherein the topshielding portion and the source regions of the first gate structure arearranged between the first gate sidewall of the first gate structure anda second gate sidewall of the second gate structure, and wherein at thefirst surface, an area between the first gate sidewall and the secondgate sidewall is filled with the top shielding portion and the sourceregions.
 8. The silicon carbide device of claim 3, wherein the topshielding portion comprises separation sections, wherein along the firstdirection, a lateral dopant profile through a transition between one ofthe separation sections and one of the source regions comprises aplateau section.
 9. The silicon carbide device of claim 3, wherein thesilicon carbide device comprises a first gate structure and aneighboring second gate structure, wherein the deep shielding portioncomprises a deep section, wherein along a second direction the deepsection is laterally separated from the first gate sidewall of the firstgate structure, and wherein the deep section laterally overlaps with asecond gate sidewall of the second gate structure.
 10. The siliconcarbide device of claim 9, wherein the deep section forms a contiguousstripe with a longitudinal axis parallel to the first direction.
 11. Thesilicon carbide device of claim 9, wherein the deep section comprises aplurality of deep sub-sections, and wherein the deep sub-sections arelaterally separated along the first direction.
 12. The silicon carbidedevice of claim 3, wherein a horizontal cross-section of the deepshielding portion comprises a grid with grid openings, and wherein eachgrid opening encloses at least a portion of one of the source regions.13. The silicon carbide device of claim 1, wherein the silicon carbidebody comprises a body region of the second conductivity type and acurrent spread region of the first conductivity type, and wherein thebody region separates the source region and the current spread region.14. The silicon carbide device of claim 1, wherein the silicon carbidebody comprises a drift structure between the gate structures and asecond surface of the silicon carbide body, and wherein the shieldingregion and the drift structure form a pn junction.
 15. The siliconcarbide device of claim 1, further comprising a body region of a secondconductivity type in contact with the first gate structure and the atleast one source region, wherein the body region and the shieldingregion are disposed at different sidewalls of the stripe-shaped trenchgate structure.
 16. A silicon carbide device, comprising: an asymmetrictransistor that includes a first stripe-shaped trench gate structureextending from a first surface into a silicon carbide body, the firstgate structure having a gate length along a lateral first direction, abottom surface and a first gate sidewall of the first gate structurebeing connected via a first bottom edge of the gate structure; a sourceregion of a first conductivity type in contact with the first gatesidewall of the first gate structure; a second stripe-shaped trench gatestructure extending from the first surface into the silicon carbidebody, the second gate structure having a gate length along a lateralfirst direction, wherein a bottom surface, a first gate sidewall, and asecond gate sidewall of the second gate structure are connected via afirst bottom edge and a second bottom edge, respectively, of the gatestructure; and a shielding region of a second conductivity type incontact with the first bottom edge and the second bottom edge of thesecond gate structure across at least 20% of the gate length of thesecond gate structure, the shielding region also adjoining the sourceregion, wherein no source regions of the first conductivity type are incontact with a second gate sidewall of the gate structure.
 17. Thesilicon carbide device of claim 16, wherein the shielding region is incontact with the first bottom edge of the second gate structure acrossthe gate length.
 18. The silicon carbide device of claim 16, wherein thesource region extends along the gate length of the first gate structure.19. The silicon carbide device of claim 16, wherein both the sourceregion and the shielding region are electrically connected to a sourcepotential.
 20. The silicon carbide device of claim 16, furthercomprising a body region of a second conductivity type in contact withthe first gate structure and the at least one source region, wherein thebody region and the shielding region are disposed at different sidewallsof the stripe-shaped trench gate structure.
 21. A silicon carbidedevice, comprising: a stripe-shaped trench gate structure extending froma first surface into a silicon carbide body, the gate structure having agate length along a lateral first direction, a bottom surface and afirst gate sidewall of the gate structure being connected via a firstbottom edge of the gate structure; at least one source region of a firstconductivity type in contact with the first gate sidewall; and ashielding region of a second conductivity type in contact with the firstbottom edge of the gate structure across at least 20% of the gatelength; wherein the shielding region comprises a top shielding portionand a deep shielding portion, wherein the top shielding portion isbetween the first surface and the deep shielding portion, and whereinthe top shielding portion is in contact with the first bottom edge;wherein the top shielding portion comprises separation sections, whereinthe separation sections are in contact with the first gate sidewall, andwherein each separation section laterally separates source regionsformed along the first direction.
 22. The silicon carbide device ofclaim 21, wherein along the first direction, a lateral dopant profilethrough a transition between one of the separation sections and one ofthe source regions comprises a plateau section.
 23. A silicon carbidedevice, comprising: a stripe-shaped trench gate structure extending froma first surface into a silicon carbide body, the gate structure having agate length along a lateral first direction, a bottom surface and afirst gate sidewall of the gate structure being connected via a firstbottom edge of the gate structure; at least one source region of a firstconductivity type in contact with the first gate sidewall; and ashielding region of a second conductivity type in contact with the firstbottom edge of the gate structure across at least 20% of the gatelength; wherein the shielding region comprises a top shielding portionand a deep shielding portion, wherein the top shielding portion isbetween the first surface and the deep shielding portion, and whereinthe top shielding portion is in contact with the first bottom edge;wherein the top shielding portion comprises separation sections that arelocated between the source regions, and wherein along the first surface,the separation sections and the source regions cover a continuous partof the first gate sidewall of the gate structure.
 24. The siliconcarbide device of claim 23, wherein along the first direction, a lateraldopant profile through a transition between one of the separationsections and one of the source regions comprises a plateau section. 25.A silicon carbide device, comprising: a stripe-shaped trench gatestructure extending from a first surface into a silicon carbide body,the gate structure having a gate length along a lateral first direction,a bottom surface and a first gate sidewall of the gate structure beingconnected via a first bottom edge of the gate structure; at least onesource region of a first conductivity type in contact with the firstgate sidewall; and a shielding region of a second conductivity type incontact with the first bottom edge of the gate structure across at least20% of the gate length; wherein the shielding region comprises a topshielding portion and a deep shielding portion, wherein the topshielding portion is between the first surface and the deep shieldingportion, and wherein the top shielding portion is in contact with thefirst bottom edge; wherein the silicon carbide device comprises a firstgate structure and a neighboring second gate structure, wherein the deepshielding portion comprises a deep section, wherein along a seconddirection the deep section is laterally separated from the first gatesidewall of the first gate structure, and wherein the deep sectionlaterally overlaps with a second gate sidewall of the second gatestructure.
 26. A silicon carbide device, comprising: a stripe-shapedtrench gate structure extending from a first surface into a siliconcarbide body, the gate structure having a gate length along a lateralfirst direction, a bottom surface and a first gate sidewall of the gatestructure being connected via a first bottom edge of the gate structure;at least one source region of a first conductivity type in contact withthe first gate sidewall; and a shielding region of a second conductivitytype in contact with the first bottom edge of the gate structure acrossat least 20% of the gate length; wherein the shielding region comprisesa top shielding portion and a deep shielding portion, wherein the topshielding portion is between the first surface and the deep shieldingportion, and wherein the top shielding portion is in contact with thefirst bottom edge; wherein a horizontal cross-section of the deepshielding portion comprises a grid with grid openings, and wherein eachgrid opening encloses at least a portion of one of the source regions.